Integrated circuit technology and fabrication: lesson 16
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Date
1996
Journal Title
Journal ISSN
Volume Title
Publisher
North Carolina University
Abstract
The lecture is about Dry Etching and Plasma Etching
Description
Keywords
Dry etching, Plasma etching
Citation
Osburn, C. & Ruggles, G.A. (1996). Integrated circuit technology and fabrication lecture 16, North Carolina University, United States.