Integrated circuit technology and fabrication: lesson 26
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Date
1996
Journal Title
Journal ISSN
Volume Title
Publisher
North Carolina University
Abstract
The lecture is about Chemical Analysis with Electrons and X-rays based on Absorption and Emission - Electron energy loss. Electron Microprose. Auger Electron Spectroscopy. Chemical Analysis with Ion Particle Beams.
Description
Keywords
Chemical analysis, Emission, Electron Microprose, Auger electron spectroscopy., Ion particle beams.
Citation
Osburn, C. & Ruggles, G.A. (1996). Integrated circuit technology and fabrication lecture 26, North Carolina University, United States.