Integrated circuit technology and fabrication: lesson 17
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Date
1996
Journal Title
Journal ISSN
Volume Title
Publisher
North Carolina University
Abstract
The lecture is about Process Integration. Yield / reliability loss in non-Planar Structures. Applications for Planarization.
Description
Keywords
Process integration, Planarization.
Citation
Osburn, C. & Ruggles, G.A. (1996). Integrated circuit technology and fabrication lecture 17, North Carolina University, United States.