Integrated circuit technology and fabrication: lesson 6
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Date
1996
Journal Title
Journal ISSN
Volume Title
Publisher
North Carolina University
Abstract
The lecture continues to talk about Chemical Vapour Deposition and Thermal Oxidation of Silicon
Description
Keywords
Chemical vapour deposition, Thermal oxidation
Citation
Osburn, C. & Ruggles, G.A. (1996). Integrated circuit technology and fabrication lecture 6, North Carolina University, United States.