Integrated Circuit Technology and Fabrication lecture: lecture 2
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Date
1996
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Publisher
University of North Carolina
Abstract
Description
The presentation is a bout MOS characterization and annealing. Objectives covered include;
1.Diiscussion of electrical defects found in MOS devices
2.Development of C.V characterization technique
3.Discussion of effects of processing on electrical defects
4.Optimal annealing considerations.