Lithography

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Date

1995

Journal Title

Journal ISSN

Volume Title

Publisher

VTR Industrial Training

Abstract

This video presents the basics of lithography. By the end of the video you should be able to understand the basic lithography principles, provide detailed discussion of ptical lithography, have proper understanding of the limits and tradeoff, and advanced lithographic techniques.

Description

Keywords

Lithography, Lithographic techniques.

Citation

VTR Industrial Training. (1995). Lithography : lesson139 . University of North Carolina, United States