Integrated Circuit Technology and Fabrication : lecture number 2
No Thumbnail Available
Date
1996
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
University of North Carolina
Abstract
Description
The lecture is about MOS characterization and annealing. It covers the following objectives;
1.Discussion of electrical defects found in MOS devices
2.Development of C-V characterization technique
3.Discussion of effects of processing and electrical defects
4.Optimal annealing considerations