Integrated circuit technology and fabrication: lesson 5
No Thumbnail Available
Date
1996
Journal Title
Journal ISSN
Volume Title
Publisher
North Carolina University
Abstract
The lecture is about Chemical Vapor Deposition : Chemical reactions for Silicon Epitaxy
Description
Keywords
Chemical vapor deposition, Chemical reactions, Silicon Epitaxy
Citation
Osburn, C. & Ruggles, G.A. (1996). Integrated circuit technology and fabrication lecture 5, North Carolina University, United States.