Osburn, Carl, Dr.Ruggles, Gary A, Dr.2018-10-152018-10-1519961996Osburn, C. & Ruggles, G.A. (1996). Integrated circuit technology and fabrication lecture 26, North Carolina University, United States.http://196.43.179.3:8080/xmlui/handle/123456789/205The lecture is about Chemical Analysis with Electrons and X-rays based on Absorption and Emission - Electron energy loss. Electron Microprose. Auger Electron Spectroscopy. Chemical Analysis with Ion Particle Beams.en-USChemical analysisEmissionElectron MicroproseAuger electron spectroscopy.Ion particle beams.Integrated circuit technology and fabrication: lesson 26Video