Osburn, Carl, Dr.Ruggles, Gary A, Dr.2018-10-152018-10-1519961996Osburn, C. & Ruggles, G.A. (1996). Integrated circuit technology and fabrication lecture 17, North Carolina University, United States.http://196.43.179.3:8080/xmlui/handle/123456789/215The lecture is about Process Integration. Yield / reliability loss in non-Planar Structures. Applications for Planarization.en-USProcess integrationPlanarization.Video