Osburn, Carl, Dr.Ruggles, Gary A, Dr.2018-10-152018-10-1519961996Osburn, C. & Ruggles, G.A. (1996). Integrated circuit technology and fabrication lecture 14, North Carolina University, United States.http://196.43.179.3:8080/xmlui/handle/123456789/171The lecture looks at diagnostic techniques and measurements - goes into describing basic materials analysis techniques, examination of the principles of beam/ material interaction; discusses topics such as generic analytical tools, optical analytical techniques, electron microscope techniques, and checmical analysis with electrons and X-Rays.en-USGeneric analytical toolsOptical analytical techniquesElectron microscope techniquesChecmical analysisVideo